Anode Layer Ion Sources

GPI has implemented a series of design improvements to enhance the reliability and performance of this source. Both linear and annular ion sources are available in custom sizes.

Linear FBALIS in action

Design Features

• Optimized magnetic field design minimizes pole sputtering, source heating and substrate contamination
  
• A converging rather than diverging Ion Beam allows direction of the full beam onto a target or substrate
  
• The internal anode is radiantly cooled. This eliminates the complex high voltage isolated water cooling requirements of other anode layer ion sources, making installation of the FBALIS compact and easy

Linear Focused Beam ALIS

• Both Linear and Annular Anode Layer Ion Sources Available
• Linear sources up to 3 meters in length
• Sources can be provided with flanges and feedthroughs for external mounting or stand-alone for internal installation

Click for Linear Anode Layer Ion Source Brochure

Click for Annular Anode Layer Ion Source Brochure

Annular Focused Beam ALIS