General Plasma is now the supplier of the Linear Ion Source (LIS). This new product line for General Plasma is termed the ‘Classic Linear Ion Source’ line or ‘Classic LIS’. The Classic LIS can be used for a variety of applications, including substrate contamination removal, surface modifications, plasma enhanced chemical vapor deposition (PECVD) and ion beam assisted deposition.
The Classic LIS is available from 38 to 370 cm in length. The Classic LIS can be flange mounted (direct mounting to chamber wall through existing ports) or remote mounted (mounted in any orientation inside the chamber using flexible lines to connect to existing feedthoughs).
For additional information on the Classic Ion Source, please click here for additional information.
| . | LIS-38 | LIS-65 | LIS-94 | LIS-120 | LIS-150 | LIS-300 | LIS-370 | ||
| . | Useable Beam Width | 28 cm (11.0″) | 55 cm (21.7″) | 84 cm (33.1″) | 110 cm (43.3″) | 140 cm (55.1″) | 254 cm (100″) | 321 cm (126″) | |
| . | Uniformity Specification | +/- 5% over useable beam width | +/-10% over useable beam width | ||||||
| . | Maximum Discharge Current (Collimated Mode)* |
0.67 A | 1.2 A | 1.67 A | 2.0 A | 2.5 A | 3.25 A | 4.00 A | |
| . | Discharge Voltage Range (Collimated) |
600-3000V | |||||||
| . | Maximum Discharge Power* | 2000 W | 3500 W | 5000 W | 6000 W | 7500 W | 9500 W | 12000 W | |
| . | Recommended Minimum Chamber Pumping Speed |
500 liters/sec min | 750 liters/sec min | 1000 liters/sec min | 1250 liters/sec min | 1500 liters/sec min | 2000 liters/sec min | 2000 liters/sec min | |
| . | Maximum Operating Pressure (Collimated) |
3 mTorr (0.004mbar)/1-2 mTorr (0.0013-0.0027 mbar) recommended | 2 mTorr (0.0027 mbar) | ||||||
| . | Typical Gas Flow Requirements |
25-50 sccm Ar 30-60 sccm 02 |
40-80 sccm Ar 50-100 sccm 02 |
50-100 sccm Ar 60-120 sccm 02 |
55-110 sccm Ar 65-130 sccm 02 |
60-120 sccm Ar 75-150 sccm 02 |
100-500 sccm | 100-600 sccm | |
*Maximum current/power may not be achieved under all vacuum conditions, or with all process gases.
For example, current with pure argon is typically less than that achieved with pure oxygen.