Target materials for sputtering magnetrons can be very expensive. General Plasma’s Rotatable Magnetrons and Moving Magnet Planar Magnetrons are engineered to achieve high target utilization, while maintaining excellent film properties and deposition uniformity.

Moving Magnet Planar Magnetron (Mov-Mag) ™

• Increased target utilization
• Excellent deposited film properties
• Compact design enables direct retrofit of existing planar magnetrons (3+ meters)

Rotary Magnetron

• 3 end block configurations available: Compact End Block, External End Block, Standard End Block
• No lip seals
• Ferro fluid vacuum seal