Rotary Magnetron Sputter Cathode | General Plasma Inc.

GPI / Products / Sputter Magnetrons / Rotary Magnetron Sputter Cathode

Integrated ceramic rotary water seal enables a rugged, low maintenance design

3 end block configurations available: Compact End Block, External End Block, Standard End Block
No lip seals

Ferro fluid vacuum seal
Integrated ceramic water coupling
Focused field magnetic bar

Fully Utilized Target Tube

Fully Utilized Target Tube

Features

Integrated ceramic water coupling
High integrity ferro fluid vacuum seal
Focused field magnetics improves deposition efficiency
Quick target changes (<20 minutes)
Non-proprietary target tube design - fabrication drawing supplied
No protruding features on target tube - enables slip on targets
Sputtering of magnetic materials also possible

Resources

Brochure: Rotary (Cylindrical) Magnetron Sputter Cathode